早在1973年,SEMI就開始與會員公司一起制定晶圓尺寸等半導(dǎo)體行業(yè)標準,目前已有800多條國際標準在半導(dǎo)體制造、平板顯示等多項領(lǐng)域得到普遍運用。而從2007年開始,隨著光伏行業(yè)的蓬勃發(fā)展,SEMI開展推動在光伏領(lǐng)域的標準制定工作。目前已經(jīng)成立了北美、歐洲、日本、臺灣地區(qū)在內(nèi)的技術(shù)委員會,接近20個任務(wù)小組或工作小組,覆蓋了包括硅材料、硅片、晶體電池、晶體組件、薄膜、原材料、測試方法、設(shè)備接口等在內(nèi)的多個領(lǐng)域。
截止2010年10月18日,SEMI已共計發(fā)布了23條光伏行業(yè)相關(guān)標準,在全球業(yè)界得到廣泛應(yīng)用和推崇
E10-0304E――設(shè)備可靠性、可用性和可維護性定義說明
Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
F47-0706――半導(dǎo)體工藝設(shè)備電壓暫降預(yù)防說明
Specification for Semiconductor Processing Equipment Voltage Sag Immunity
F108-0310――用于半導(dǎo)體、平板顯示、太陽能電池制造的液體化學(xué)試劑管道傳送部件指南
Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
M6-1108――用于制造光伏電池的硅晶圓規(guī)格說明
Specification for Silicon Wafers for Use as Photovoltaic Solar Cells
M44-0305――硅中間隙氧轉(zhuǎn)化因素指南
Guide to Conversion Factors for Interstitial Oxygen in Silicon
ME391-0310――利用穩(wěn)態(tài)表面光電壓測試方法測量非本征半導(dǎo)體中少數(shù)載流子擴散長度的方法
Test Method for Minority Carrier Diffusion Length in Extrinsic Semiconductors by Measurement of Steady-State Surface Photovotake
MF1188-1107――利用短基線紅外吸收法測量硅中間隙氧含量的方法
Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption With Short Baseline
MF1619-1107――利用在布魯斯特角進行p型極化入射獲得紅外吸收光譜測量硅晶圓中間隙氧含量的測試方法
Test Method for Measurement of Interstitial Oxygen Content of Silicon Wafers by Infrared Absorption Spectroscopy with p-Polarized Radiation Incident at the Brewster Angle
MF1727-0304――檢測拋光硅晶圓中因氧化導(dǎo)致缺陷的操作方法
Practice for Detection of Oxidation Induced Defects in Polished Silicon Wafers
MF 1809-0704――表征硅中結(jié)構(gòu)性缺陷的刻蝕方案的選擇與使用指南
Guide for Selection and Use of Etching Solutions to Delineate Structural Defects in Silicon
MF 1810-0304――硅中優(yōu)先刻蝕或綴飾的表面缺陷的計量測試方法
Test Method for Counting Preferentially Etched or Decorated Surface Defects in Silicon Wafers
PV1-0709――利用高質(zhì)量分辨率輝光放電質(zhì)譜測量光伏級硅中微量元素的方法
Test Method for Measuring Trace Elements in Photovoltaic-Grade Silicon by High-Mass Resolution Glow Discharge Mass Spectrometry
PV2-0709E――光伏設(shè)備通信接口指南(PV ECI)
Guide for PV Equipment Communication Interfaces -Unified communication standard between PV production equipment and the shop floor
PV3-0310――用于光伏電池處理工藝的高純水指南
Guide for High Purity Water Used In Photovoltaic Cell Processing
PV4-0710――用于光伏應(yīng)用薄膜第五代襯底尺寸范圍的規(guī)范
Specification for range of 5th generation substrate sizes for thin-film Photovoltaic application
PV5-1110――用于光伏行業(yè)的氧氣(大宗氣體)指南
Guide for Oxygen (O2), Bulk, Used In Photovoltaic Applications
PV6-1110――用于光伏行業(yè)的氬氣(大宗氣體)指南
Guide for Argon (Ar), Bulk, Used In Photovoltaic Applications
PV7-1110――用于光伏行業(yè)的氫氣(大宗氣體)指南
Guide for Hydrogen (H2), Bulk, Used In Photovoltaic Applications
PV8-1110――用于光伏行業(yè)的氮氣(大宗氣體)指南
Guide for Nitrogen (N2), Bulk, Used In Photovoltaic Applications
PV11-1110――用于光伏行業(yè)的氫氟酸規(guī)格說明<